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Sputtering Targets - Fluorides

EVOCHEM’s product program offers a wide range of Fluorides. Besides the high purity of these compounds, some fluorides like Magnesium Fluoride and Lanthanum Fluoride are very reliable materials especially suitable for DUV/VUV.

Please provide us with full details on the material, purity, dimensions, any special tolerances and the quantity required. We are pleased to provide a tailor made quotation.

Name Formula Purities
Aluminum Fluoride AlF3 4N
Barium Fluoride BaF2 3N-3N5
Calcium Fluoride CaF2 3N-4N
Cerium Fluoride CeF2 3N-4N
Cryolite Na3AIF6 4N
Dysprosium Fluoride DyF3 3N
Erbium Fluoride ErF3 4N
Lanthanum Fluoride LaF4 4N
Lead Fluoride PbF2 2N5
Lithium Fluoride LiF 2N
Praseodymium Fluoride PrF3 2N5
Magnesium Fluoride MgF2 3N-5N
Neodymium Fluoride NdF3 3N
Samarium Fluoride SmF3 3N
Sodium Fluoride NaF 3N
Strontium Fluoride SrF2 3N
Yttrium Fluoride YF3 4N
Ytterbium Fluoride YbF3 4N-5N

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